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MEMS based acoustic transducers are of high interest for in-ear-applications such as hearables and hearing aids. In this paper we present detailed measurements of CMOS compatible MEMS speakers based on electrostatic bending actuators. The results are discussed in the context of basic modeling approaches and analytical calculations. At 500 Hz a sound pressure level of 70 dB was measured with a THD of 5% in a standard ear simulator. The THD is dominated by second-order harmonic distortion products. Future work will focus on increased SPL and reduced distortion with optimized actuator design.
Author (s): Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A. G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias
Affiliation:
Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Germany; Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany
(See document for exact affiliation information.)
Publication Date:
2019-08-06
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Permalink: https://aes2.org/publications/elibrary-page/?id=20522
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Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A. G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias; 2019; Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers [PDF]; Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Germany; Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Paper 10; Available from: https://aes2.org/publications/elibrary-page/?id=20522
Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A. G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias; Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers [PDF]; Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Germany; Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Paper 10; 2019 Available: https://aes2.org/publications/elibrary-page/?id=20522
@article{ehrig2019acoustic,
author={ehrig lutz and kaiser bert and schenk hermann a. g. and stolz michael and langa sergiu and conrad holger and schenk harald and männchen andreas and brocks tobias},
journal={journal of the audio engineering society},
title={acoustic validation of electrostatic all-silicon mems-speakers},
year={2019},
number={10},
month={august},}
TY – paper
TI – Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
AU – Ehrig, Lutz
AU – Kaiser, Bert
AU – Schenk, Hermann A. G.
AU – Stolz, Michael
AU – Langa, Sergiu
AU – Conrad, Holger
AU – Schenk, Harald
AU – Männchen, Andreas
AU – Brocks, Tobias
PY – 2019
JO – Journal of the Audio Engineering Society
VL – 10
Y1 – August 2019