The construction and characteristics of an experimental semiconductor microphone utilizing the piezoresistance property of silicon are described. The sensing element consists of a silicon element mounted on a cantilever beam. The output of the microphone is fed into a single transistor preamplifier and a Motorola MC 1524 integrated circuit audio power amplifier to produce a 1 watt power output at the loudspeaker.
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https://aes2.org/publications/elibrary-page/?id=990
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